Gratings for metrology and process control 2: Thin film thickness measurement
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چکیده
منابع مشابه
Twin-rainbow metrology. I. Measurement of the thickness of a thin liquid film draining under gravity.
We describe twin-rainbow metrology, a new optical technique used to measure the thickness of thin films in a cylindrical geometry. We also present an application of the technique: measurement of the thickness of a Newtonian fluid draining under gravity. We compare these measurements with fluid mechanics models.
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ژورنال
عنوان ژورنال: Applied Optics
سال: 1984
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.23.000576